Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6614022 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Maki Tanaka, Junzou Azuma +2 more | 2003-07-01 |
| 6507029 | Sample processing apparatus and method for removing charge on sample through light irradiation | Norimasa Nishimura, Akira Shimase, Junzou Azuma, Hiroya Koshishiba | 2003-01-14 |