Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6613593 | Method of fabricating a semiconductor device | Masahiro Watanabe, Kenji Watanabe, Mari Nozoe, Hiroshi Miyai | 2003-09-02 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Asahiro Kuni, Junzou Azuma +2 more | 2003-07-01 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Hiroyuki Shinada, Kenji Watanabe, Keiichi Saiki, Aritoshi Sugimoto +2 more | 2003-06-24 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Taku Ninomiya | 2003-05-06 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |