Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583413 | Method of inspecting a circuit pattern and inspecting instrument | Hiroyuki Shinada, Atsuko Takafuji, Takanori Ninomiya, Yuko Sasaki, Mari Nozoe +5 more | 2003-06-24 |
| 6580075 | Charged particle beam scanning type automatic inspecting apparatus | Masatsugu Kametani, Kenjiro Yamamoto, Osamu Yamada, Katsuhisa Ike | 2003-06-17 |
| 6559459 | Convergent charged particle beam apparatus and inspection method using same | Maki Tanaka, Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada | 2003-05-06 |
| 6538248 | Charged particle beam scanning type automatic inspecting apparatus | Masatsugu Kametani, Kenjiro Yamamoto, Osamu Yamada, Katsuhisa Ike | 2003-03-25 |