Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6580075 | Charged particle beam scanning type automatic inspecting apparatus | Masatsugu Kametani, Taku Ninomiya, Osamu Yamada, Katsuhisa Ike | 2003-06-17 |
| 6538248 | Charged particle beam scanning type automatic inspecting apparatus | Masatsugu Kametani, Taku Ninomiya, Osamu Yamada, Katsuhisa Ike | 2003-03-25 |