Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Tetsuya Watanabe, Hisato Nakamura +3 more | 2003-07-22 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Hiroyuki Shinada, Kenji Watanabe, Aritoshi Sugimoto, Hiroshi Morioka +2 more | 2003-06-24 |