Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661912 | Inspecting method and apparatus for repeated micro-miniature patterns | Junichi Taguchi, Masami Ikota, Yuko Inoue, Tetsuya Watanabe, Wakana Shinke | 2003-12-09 |
| 6583634 | Method of inspecting circuit pattern and inspecting instrument | Mari Nozoe, Hiroyuki Shinada, Kenji Watanabe, Keiichi Saiki, Hiroshi Morioka +2 more | 2003-06-24 |
| 6573546 | Semiconductor integrated circuit device and process for manufacturing the same | Kiyonori Ohyu, Makoto Ohkura, Yoshitaka Tadaki, Makoto Ogasawara, Masashi Horiguchi +2 more | 2003-06-03 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |