Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6661912 | Inspecting method and apparatus for repeated micro-miniature patterns | Junichi Taguchi, Aritoshi Sugimoto, Masami Ikota, Tetsuya Watanabe, Wakana Shinke | 2003-12-09 |
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Tetsuya Watanabe, Hisato Nakamura +3 more | 2003-07-22 |