Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Yutaka Kaneko +12 more | 2003-05-06 |
| 6518548 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Shigeki Hirasawa +2 more | 2003-02-11 |
| 6511428 | Ultrasonic medical treating device | Takashi Azuma, Kenichi Kawabata, Shinichiro Umemura, Kazuaki Sasaki, Ryuichi Shinomura +3 more | 2003-01-28 |