Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6535921 | Method of sending and receiving information and system using such method | Michio Morioka, Tadashi Kuwabara, Tomochika Ozaki, Yuichi Yagawa, Akio Yajima | 2003-03-18 |
| 6518548 | Substrate temperature control system and method for controlling temperature of substrate | Masakazu Sugaya, Fumio Murai, Yutaka Kaneko, Masafumi Kanetomo, Tomoji Watanabe +2 more | 2003-02-11 |