Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635873 | Scanning electron microscope with voltage applied to the sample | Hideo Todokoro, Makoto Ezumi | 2003-10-21 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Mikio Ichihashi +6 more | 2003-01-28 |
| 6509564 | WORKPIECE HOLDER, SEMICONDUCTOR FABRICATING APPARATUS, SEMICONDUCTOR INSPECTING APPARATUS, CIRCUIT PATTERN INSPECTING APPARATUS, CHARGED PARTICLE BEAM APPLICATION APPARATUS, CALIBRATING SUBSTRATE, WORKPIECE HOLDING METHOD, CIRCUIT PATTERN INSPECTING METHOD, AND CHARGED PARTICLE BEAM APPLICATION METHOD | Hiroyuki Suzuki, Hiroyuki Shinada, Atsuko Takafuji, Shuji Sugiyama | 2003-01-21 |
| 6504609 | Inspection method, apparatus and system for circuit pattern | Yasuhiko Nara, Kazuhisa Machida, Mari Nozoe, Hiroshi Morioka, Takashi Hiroi | 2003-01-07 |