Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6580074 | Charged particle beam emitting device | Mitsugu Sato | 2003-06-17 |
| 6541771 | Scanning electron microscope | Mitsugu Sato | 2003-04-01 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Hideo Todokoro, Hiroyoshi Mori, Mitsugu Sato, Yasutsugu Usami, Mikio Ichihashi +6 more | 2003-01-28 |