Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657193 | Scanning electron microscope | Yukari Dan, Ryuichiro Tamochi | 2003-12-02 |
| 6653633 | Charged particle beam apparatus | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2003-11-25 |
| 6627889 | Apparatus and method for observing sample using electron beam | Isao Ochiai, Hidemi Koike, Satoshi Tomimatsu, Muneyuki Fukuda, Tohru Ishitani | 2003-09-30 |
| 6580074 | Charged particle beam emitting device | Yuko Iwabuchi | 2003-06-17 |
| 6555819 | Scanning electron microscope | Naomasa Suzuki, Toshiro Kubo, Noriaki Arai, Hideo Todokoro, Yoichi Ose | 2003-04-29 |
| 6555816 | Scanning electron microscope and sample observation method using the same | Tetsuya Sawahata | 2003-04-29 |
| 6541771 | Scanning electron microscope | Yuko Iwabuchi | 2003-04-01 |
| 6538249 | Image-formation apparatus using charged particle beams under various focus conditions | Atsushi Takane, Haruo Yoda, Hideo Todokoro, Fumio Mizuno, Shoji Yoshida +2 more | 2003-03-25 |
| 6512227 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Yuko Iwabuchi, Hideo Todokoro, Hiroyoshi Mori, Yasutsugu Usami, Mikio Ichihashi +6 more | 2003-01-28 |