Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664552 | Method and apparatus for specimen fabrication | Hiroyasu Shichi, Tohru Ishitani, Kaoru Umemura, Eiichi Seya, Mitsuo Tokuda +3 more | 2003-12-16 |
| 6627889 | Apparatus and method for observing sample using electron beam | Isao Ochiai, Satoshi Tomimatsu, Muneyuki Fukuda, Mitsugu Sato, Tohru Ishitani | 2003-09-30 |
| 6566654 | Inspection of circuit patterns for defects and analysis of defects using a charged particle beam | Ryuichi Funatsu, Shigeto Isakozawa | 2003-05-20 |