Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566654 | Inspection of circuit patterns for defects and analysis of defects using a charged particle beam | Ryuichi Funatsu, Hidemi Koike | 2003-05-20 |
| 6531697 | Method and apparatus for scanning transmission electron microscopy | Kuniyasu Nakamura, Hiroshi Kakibayashi, Mikio Ichihashi, Yuji Sato, Takahito Hashimoto | 2003-03-11 |