Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667486 | Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same | Hiroya Ohta, Yasunari Sohda, Norio Saitou, Haruo Yoda, Shin'ichi Hashimoto | 2003-12-23 |
| 6593686 | Electron gun and electron beam drawing apparatus using the same | — | 2003-07-15 |
| 6559463 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Haruhito Ono, Masato Muraki | 2003-05-06 |
| 6515409 | Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method | Masato Muraki | 2003-02-04 |