Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657210 | Electron beam exposure method, a method of constructing exposure control data, and a computer-readable medium | — | 2003-12-02 |
| 6636349 | Reflection and refraction optical system and projection exposure apparatus using the same | Kazuhiro Takahashi | 2003-10-21 |
| 6583430 | Electron beam exposure method and apparatus | — | 2003-06-24 |
| 6566664 | Charged-particle beam exposure apparatus and device manufacturing method | — | 2003-05-20 |
| 6559463 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Haruhito Ono, Yoshikiyo Yui | 2003-05-06 |
| 6559456 | Charged particle beam exposure method and apparatus | — | 2003-05-06 |
| 6552353 | Multi-electron beam exposure method and apparatus and device manufacturing method | — | 2003-04-22 |
| 6515409 | Charged-particle beam exposure apparatus, exposure system, control method therefor, and device manufacturing method | Yoshikiyo Yui | 2003-02-04 |