Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6603128 | Charged-particle beam exposure apparatus and device manufacturing method | Hiroshi Maehara, Yasuhiro Shimada, Takayuki Yagi | 2003-08-05 |
| 6559463 | Mask pattern transfer method, mask pattern transfer apparatus using the method, and device manufacturing method | Yoshikiyo Yui, Masato Muraki | 2003-05-06 |