Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667486 | Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same | Yasunari Sohda, Norio Saitou, Haruo Yoda, Yoshikiyo Yui, Shin'ichi Hashimoto | 2003-12-23 |
| 6511048 | Electron beam lithography apparatus and pattern forming method | Yasunari Sohda, Yasuhiro Someda, Takashi Matsuzaka, Norio Saitou, Yoshinori Nakayama | 2003-01-28 |