Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583431 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Masahide Okumura, Hidetoshi Satoh | 2003-06-24 |
| 6555833 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Masahide Okumura, Hidetoshi Satoh | 2003-04-29 |
| 6518656 | Reduced thickness optical image pickup device with improved sealing and method of making same | Hirokazu Nakayoshi | 2003-02-11 |
| 6511048 | Electron beam lithography apparatus and pattern forming method | Yasunari Sohda, Yasuhiro Someda, Hiroya Ohta, Takashi Matsuzaka, Norio Saitou | 2003-01-28 |
| 6509572 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Masahide Okumura, Hidetoshi Satoh | 2003-01-21 |