Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6583431 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2003-06-24 |
| 6555833 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2003-04-29 |
| 6509572 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Hidetoshi Satoh | 2003-01-21 |