Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653052 | Electron device manufacturing method, a pattern forming method, and a photomask used for those methods | Toshihiko Tanaka, Norio Hasegawa, Hiroshi Shiraishi | 2003-11-25 |
| 6583431 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura | 2003-06-24 |
| 6573520 | Electron beam lithography system | Hiroshi Tsuji, Kunio Harada, Yasunari Sohda | 2003-06-03 |
| 6555833 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura | 2003-04-29 |
| 6509572 | Charged particle beam lithography apparatus for forming pattern on semi-conductor | Hiroyuki Ito, Yasunari Sohda, Yasuhiro Someda, Yoshinori Nakayama, Masahide Okumura | 2003-01-21 |