Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Toshihiko Nakata, Hiroaki Shishido +1 more | 2003-09-16 |
| 6576559 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Toshihiko Nakata, Takanori Ninomiya, Hiroyuki Nakano | 2003-06-10 |
| 6556290 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Hiroaki Shishido +1 more | 2003-04-29 |