Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Toshihiko Nakata, Minoru Yoshida +1 more | 2003-09-16 |
| 6556290 | Defect inspection method and apparatus therefor | Shunji Maeda, Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto +1 more | 2003-04-29 |