Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6654112 | Apparatus and method for inspecting defects | Minori Noguchi, Yukihiro Shibata, Takanori Ninomiya | 2003-11-25 |
| 6621571 | Method and apparatus for inspecting defects in a patterned specimen | Atsushi Yoshida, Yukihiro Shibata, Toshihiko Nakata, Hiroaki Shishido, Minoru Yoshida +1 more | 2003-09-16 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Maki Tanaka, Asahiro Kuni +2 more | 2003-07-01 |
| 6566671 | Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit therefor | Atsushi Yoshida, Takafumi Okabe, Hisashi Mizumoto, Mitsunobu Isobe | 2003-05-20 |
| 6559663 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2003-05-06 |
| 6556290 | Defect inspection method and apparatus therefor | Atsushi Yoshida, Yukihiro Shibata, Minoru Yoshida, Sachio Uto, Hiroaki Shishido +1 more | 2003-04-29 |
| 6507417 | Method and apparatus for picking up 2D image of an object to be sensed | Hiroshi Makihira, Kenji Oka, Minoru Yoshida, Yasuhiko Nakayama | 2003-01-14 |