Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566671 | Microscopic defect inspection apparatus and method thereof, as well as positional shift calculation circuit therefor | Atsushi Yoshida, Shunji Maeda, Takafumi Okabe, Hisashi Mizumoto | 2003-05-20 |