Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638403 | Plasma processing apparatus with real-time particle filter | Hiroshi Inaba, Shinji Sasaki, Shinya Hirano, Kenji Furusawa, Atsushi Amatatsu +1 more | 2003-10-28 |
| 6631547 | Manufacturing method for thin film magnetic heads | Minoru Yoshida, Hideaki Sasazawa, Toshihiko Nakata | 2003-10-14 |