Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489247 | Copper etch using HCl and HBR chemistry | Yan Ye, Allen Zhao, Xiancan Deng | 2002-12-03 |
| 6488862 | Etched patterned copper features free from etch process residue | Yan Ye, Gerald Yin | 2002-12-03 |
| 6466881 | Method for monitoring the quality of a protective coating in a reactor chamber | Hong Shih, Joe Sommers | 2002-10-15 |
| 6458516 | Method of etching dielectric layers using a removable hardmask | Yan Ye, Pavel Ionov, Allen Zhao, Peter Hsieh, Chun Yan +1 more | 2002-10-01 |
| 6413389 | Method for recovering metal from etch by-products | Hong Shih, Danny Lu, Nianci Han, Li Xu | 2002-07-02 |
| 6372633 | Method and apparatus for forming metal interconnects | Dan Maydan, Ashok Sinha, Zheng Xu, Liang Chen, Roderick C. Mosely +3 more | 2002-04-16 |
| 6352049 | Plasma assisted processing chamber with separate control of species density | Gerald Yin, Arnold Kolandenko, Hong Ching Shan, Peter Loewenhardt, Chii Guang Lee +9 more | 2002-03-05 |
| 6352611 | Ceramic composition for an apparatus and method for processing a substrate | Nianci Han, Hong Shih, Jie Yuan, Danny Lu | 2002-03-05 |