Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466881 | Method for monitoring the quality of a protective coating in a reactor chamber | Joe Sommers, Diana Xiaobing Ma | 2002-10-15 |
| 6413389 | Method for recovering metal from etch by-products | Danny Lu, Nianci Han, Li Xu, Diana Xiaobing Ma | 2002-07-02 |
| 6352081 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Danny Lu, Allen Zhao, Peter Hsieh, Li Xu, Yan Ye | 2002-03-05 |
| 6352611 | Ceramic composition for an apparatus and method for processing a substrate | Nianci Han, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2002-03-05 |