Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6476398 | Beam automation in charged-particle-beam systems | Richard Barnard | 2002-11-05 |
| 6413389 | Method for recovering metal from etch by-products | Hong Shih, Danny Lu, Nianci Han, Diana Xiaobing Ma | 2002-07-02 |
| 6352081 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Danny Lu, Allen Zhao, Peter Hsieh, Hong Shih, Yan Ye | 2002-03-05 |