Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458516 | Method of etching dielectric layers using a removable hardmask | Yan Ye, Pavel Ionov, Allen Zhao, Diana Xiaobing Ma, Chun Yan +1 more | 2002-10-01 |
| 6352081 | Method of cleaning a semiconductor device processing chamber after a copper etch process | Danny Lu, Allen Zhao, Hong Shih, Li Xu, Yan Ye | 2002-03-05 |