Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458516 | Method of etching dielectric layers using a removable hardmask | Yan Ye, Allen Zhao, Peter Hsieh, Diana Xiaobing Ma, Chun Yan +1 more | 2002-10-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458516 | Method of etching dielectric layers using a removable hardmask | Yan Ye, Allen Zhao, Peter Hsieh, Diana Xiaobing Ma, Chun Yan +1 more | 2002-10-01 |