Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413389 | Method for recovering metal from etch by-products | Hong Shih, Danny Lu, Li Xu, Diana Xiaobing Ma | 2002-07-02 |
| 6352611 | Ceramic composition for an apparatus and method for processing a substrate | Hong Shih, Jie Yuan, Danny Lu, Diana Xiaobing Ma | 2002-03-05 |