Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458516 | Method of etching dielectric layers using a removable hardmask | Yan Ye, Pavel Ionov, Allen Zhao, Peter Hsieh, Diana Xiaobing Ma +1 more | 2002-10-01 |
| 6455431 | NH3 plasma descumming and resist stripping in semiconductor applications | Chang-Lin Hsieh, Hui Chen, Yan Ye | 2002-09-24 |
| 6352611 | Ceramic composition for an apparatus and method for processing a substrate | Nianci Han, Hong Shih, Danny Lu, Diana Xiaobing Ma | 2002-03-05 |
| 6347522 | Cooling system for HTS machines | James Maguire, Peter M. Winn, Ahmed Sidi-Yekhlef | 2002-02-19 |