Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489247 | Copper etch using HCl and HBR chemistry | Yan Ye, Allen Zhao, Diana Xiaobing Ma | 2002-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489247 | Copper etch using HCl and HBR chemistry | Yan Ye, Allen Zhao, Diana Xiaobing Ma | 2002-12-03 |