Issued Patents 1997
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5702529 | Method of making doped semiconductor film having uniform impurity concentration on semiconductor substrate and apparatus for making the same | Yuuichi Mikata, Katsunori Ishihara | 1997-12-30 |
| 5679610 | Method of planarizing a semiconductor workpiece surface | Tetsuo Matsuda | 1997-10-21 |
| 5679484 | Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask | Shinichi Ito, Haruo Okano, Toru Watanabe | 1997-10-21 |
| 5660744 | Plasma generating apparatus and surface processing apparatus | Makoto Sekine, Keiji Horioka, Haruo Okano, Isahiro Hasegawa, Masaki Narita | 1997-08-26 |
| 5660671 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1997-08-26 |
| 5643056 | Revolving drum polishing apparatus | Masayoshi Hirose, Seiji Ishikawa, Norio Kimura, Yoshimi Sasaki, Kouki Yamada +2 more | 1997-07-01 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1997-06-17 |
| 5639308 | Plasma apparatus | Yuichiro Yamazaki, Motosuke Miyoshi | 1997-06-17 |
| 5637153 | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus | Reiji Niino, Yoshiyuki Fujita, Hideki Lee, Yasuo Imamura, Toshiharu Nishimura +4 more | 1997-06-10 |
| 5636258 | In-situ temperature measurement using X-ray diffraction | James G. Ryan, Gregory Brian Stephenson, Hans-Joerg Timme | 1997-06-03 |
| 5633207 | Method of forming a wiring layer for a semiconductor device | Hiroyuki Yano | 1997-05-27 |
| 5620815 | Exposure mask, exposure mask substrate, method for fabricating the same, and method for forming pattern based on exposure mask | Shinichi Ito, Haruo Okano, Toru Watanabe | 1997-04-15 |
| 5616063 | Polishing apparatus | Riichirou Aoki, Hiromi Yajima, Masako Kodera, Shirou Mishima, Atsushi Shigeta +3 more | 1997-04-01 |
| 5611942 | Method for producing tips for atomic force microscopes | Tadashi Mitsui | 1997-03-18 |
| 5609148 | Method and apparatus for dicing semiconductor wafers | Alexander Mitwalsky | 1997-03-11 |
| 5605574 | Semiconductor wafer support apparatus and method | Yoshitaka Tsunashima | 1997-02-25 |
| 5593537 | Apparatus for processing semiconductor wafers | William J. Cote, James Ryan, Hiroyuki Yano | 1997-01-14 |