Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5695601 | Method for planarizing a semiconductor body by CMP method and an apparatus for manufacturing a semiconductor device using the method | Atsushi Shigeta, Shiro Mishima, Hiromi Yajima, Riichirou Aoki | 1997-12-09 |
| 5653623 | Polishing apparatus with improved exhaust | Norio Kimura, Seiji Ishikawa, Atsushi Shigeta, Riichirou Aoki | 1997-08-05 |
| 5616063 | Polishing apparatus | Katsuya Okumura, Riichirou Aoki, Hiromi Yajima, Shirou Mishima, Atsushi Shigeta +3 more | 1997-04-01 |
| 5597341 | Semiconductor planarizing apparatus | Hiroyuki Yano, Atsushi Shigeta, Riichirou Aoki, Hiromi Yajima, Haruo Okano | 1997-01-28 |