Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660671 | Magnetron plasma processing apparatus and processing method | Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1997-08-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5660671 | Magnetron plasma processing apparatus and processing method | Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1997-08-26 |