Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Shoji Kano, Koji Hagiwara, Nobuo Arai, Kenji Ishikawa | 1997-09-09 |
| 5660671 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Keiji Horioka, Isahiro Hasegawa +3 more | 1997-08-26 |
| 5618350 | Processing apparatus | Kenji Ishikawa | 1997-04-08 |
| 5591269 | Vacuum processing apparatus | Kenji Ishikawa, Youichi Deguchi, Hironori Yagi, Nobuo Kawada, Isao Yanagisawa | 1997-01-07 |