Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665166 | Plasma processing apparatus | Satoru Kawakami, Yoichi Ueda, Mitsuaki Komino | 1997-09-09 |
| 5591269 | Vacuum processing apparatus | Junichi Arami, Kenji Ishikawa, Hironori Yagi, Nobuo Kawada, Isao Yanagisawa | 1997-01-07 |