YU

Yoichi Ueda

TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
📍 Yokohama, NJ: #6 of 10 inventorsTop 60%
Overall (1997): #54,982 of 185,788Top 30%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5665166 Plasma processing apparatus Youichi Deguchi, Satoru Kawakami, Mitsuaki Komino 1997-09-09