Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665166 | Plasma processing apparatus | Youichi Deguchi, Satoru Kawakami, Yoichi Ueda | 1997-09-09 |
| 5660740 | Treatment apparatus control method | — | 1997-08-26 |
| 5625526 | Electrostatic chuck | Masahide Watanabe, Masami Kubota, Shiro Koyama, Kenji Ishikawa, Kouichi Kazama +1 more | 1997-04-29 |