Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Yoichi Deguchi, Satoru Kawakami, Kenji Ishikawa | 1997-09-09 |
| 5625526 | Electrostatic chuck | Masahide Watanabe, Masami Kubota, Kenji Ishikawa, Kouichi Kazama, Mitsuaki Komino +1 more | 1997-04-29 |