Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Satoru Kawakami, Shiro Koyama, Kenji Ishikawa | 1997-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Satoru Kawakami, Shiro Koyama, Kenji Ishikawa | 1997-09-09 |