Issued Patents 1997
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665167 | Plasma treatment apparatus having a workpiece-side electrode grounding circuit | Yoichi Deguchi, Satoru Kawakami, Shiro Koyama | 1997-09-09 |
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Shoji Kano, Koji Hagiwara, Nobuo Arai, Junichi Arami | 1997-09-09 |
| 5625526 | Electrostatic chuck | Masahide Watanabe, Masami Kubota, Shiro Koyama, Kouichi Kazama, Mitsuaki Komino +1 more | 1997-04-29 |
| 5618350 | Processing apparatus | Junichi Arami | 1997-04-08 |
| 5595916 | Silicon oxide film evaluation method | Shuzo Fujimura, Hiroki Ogawa, Carlos R. Inomata | 1997-01-21 |
| 5591269 | Vacuum processing apparatus | Junichi Arami, Youichi Deguchi, Hironori Yagi, Nobuo Kawada, Isao Yanagisawa | 1997-01-07 |