Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Shoji Kano, Nobuo Arai, Junichi Arami, Kenji Ishikawa | 1997-09-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Shoji Kano, Nobuo Arai, Junichi Arami, Kenji Ishikawa | 1997-09-09 |