SK

Shoji Kano

SC Shin-Etsu Chemical Co.: 1 patents #80 of 182Top 45%
TL Tokyo Electron Limited: 1 patents #52 of 216Top 25%
Overall (1997): #78,674 of 185,788Top 45%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5665260 Ceramic electrostatic chuck with built-in heater Nobuo Kawada, Koji Hagiwara, Nobuo Arai, Junichi Arami, Kenji Ishikawa 1997-09-09