Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Shoji Kano, Koji Hagiwara, Junichi Arami, Kenji Ishikawa | 1997-09-09 |
| 5632250 | Gas fuel supply system for vehicle | Atsushi Kato, Yoshikazu Ohshima, Eisaku Gosho, Kazuhiro Ueda, Shigeo Hidai +6 more | 1997-05-27 |