Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5665260 | Ceramic electrostatic chuck with built-in heater | Shoji Kano, Koji Hagiwara, Nobuo Arai, Junichi Arami, Kenji Ishikawa | 1997-09-09 |
| 5663865 | Ceramic electrostatic chuck with built-in heater | Ryoji Nakajima, Toshihiko Shindo, Takaaki Nagao | 1997-09-02 |
| 5606484 | Ceramic electrostatic chuck with built-in heater | Kazuhiro Yamaguchi | 1997-02-25 |
| 5591269 | Vacuum processing apparatus | Junichi Arami, Kenji Ishikawa, Youichi Deguchi, Hironori Yagi, Isao Yanagisawa | 1997-01-07 |