TS

Toshihiko Shindo

SC Shin-Etsu Chemical Co.: 1 patents #80 of 182Top 45%
Overall (1997): #64,960 of 185,788Top 35%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5663865 Ceramic electrostatic chuck with built-in heater Nobuo Kawada, Ryoji Nakajima, Takaaki Nagao 1997-09-02