TN

Takaaki Nagao

SC Shin-Etsu Chemical Co.: 1 patents #80 of 182Top 45%
📍 Ibaraki, JP: #166 of 586 inventorsTop 30%
Overall (1997): #71,499 of 185,788Top 40%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5663865 Ceramic electrostatic chuck with built-in heater Nobuo Kawada, Ryoji Nakajima, Toshihiko Shindo 1997-09-02